Ametek CG1000-RTP

Ametek CG1000RTP

Ametek CG1000-RTP

The importance of oxygen contamination control is best
illustrated in the deposition of the titanium silicide used to
assure adequate conductivity between the silicon material
and the overlaying metal conductor. When oxygen is present
during the deposition, it reacts with the titanium and contaminates the process. The Dycor CG 1 000 RTP Oxygen Analyzer improves your yield by detecting oxygen contamination at the parts-per-million level.


  • Fast Response Over A Wide Operating Range
  • Acquisition System
  • Easy- To-Use, Menu-Driven Software
  • Electronic Flow Sensor
  • Zirconium Oxide Sensor

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